Electric heating, cooling, and temperature control solutions for:

  • Delivery of gases and liquids from the gas cabinet to the vacuum chamber and exhausting gases from the vacuum chamber to the scrubber.
  • Ultra-clean vacuum deposition equipment used in processing semiconductor and photovoltaic devices.
  • Dry etch, wet etch, ashing, and cleaning equipment used in the processing of semiconductor and photovoltaic devices.
  • Assembly, packaging, and testing of from nano-technology devices to large scale thin film photovoltaic modules.

Ceramic fiber furnaces are used for:

  • Semi conductor wafer fabrication
  • Diffusion furnace chambers