Electric heating, cooling, and temperature control solutions for:
- Delivery of gases and liquids from the gas cabinet to the vacuum chamber and exhausting gases from the vacuum chamber to the scrubber.
- Ultra-clean vacuum deposition equipment used in processing semiconductor and photovoltaic devices.
- Dry etch, wet etch, ashing, and cleaning equipment used in the processing of semiconductor and photovoltaic devices.
- Assembly, packaging, and testing of from nano-technology devices to large scale thin film photovoltaic modules.
Ceramic fiber furnaces are used for:
- Semi conductor wafer fabrication
- Diffusion furnace chambers